검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Active corner engineering in the process integration for shallow trench isolation Balasubramanian N, Johnson E, Peidous IV, Ming S, Sundaresan R Journal of Vacuum Science & Technology B, 18(2), 700, 2000 |
| 2 |
Experimental study of Si3N4 viscosity for calibration of stress-dependent models of silicon oxidation Loiko KV, Peidous IV, Zu Y, Ho HM Journal of the Electrochemical Society, 146(11), 4226, 1999 |