검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etch characteristics of HfO2 films on Si substrates Norasetthekul S, Park PY, Baik KH, Lee KP, Shin JH, Jeong BS, Shishodia V, Norton DP, Pearton ST Applied Surface Science, 187(1-2), 75, 2002 |
| No. | Article |
|---|---|
| 1 |
Etch characteristics of HfO2 films on Si substrates Norasetthekul S, Park PY, Baik KH, Lee KP, Shin JH, Jeong BS, Shishodia V, Norton DP, Pearton ST Applied Surface Science, 187(1-2), 75, 2002 |