검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electrical Characterization and Surface-Analysis of Dry Etch-Induced Damage on Si After Etching in on ECR Source Sung KT, Pang SW, Cole MW, Pearce N Journal of the Electrochemical Society, 142(1), 206, 1995 |
| No. | Article |
|---|---|
| 1 |
Electrical Characterization and Surface-Analysis of Dry Etch-Induced Damage on Si After Etching in on ECR Source Sung KT, Pang SW, Cole MW, Pearce N Journal of the Electrochemical Society, 142(1), 206, 1995 |