검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system Liddle JA, Blakey MI, Bolan K, Farrow RC, Gallatin GM, Kasica R, Katsap V, Knurek CS, Li J, Mkrtchyan M, Novembre AE, Ocola L, Orphanos PA, Peabody ML, Stanton ST, Teffeau K, Waskiewicz WK, Munro E Journal of Vacuum Science & Technology B, 19(2), 476, 2001 |
| 2 |
Pattern placement correction methodology for 200 mm SCALPEL masks Ocola LE, Farrow RC, Kasica RJ, Caminos CG, Rutberg L, Fullowan RF, Teffeau K, Blakey MI, Peabody ML, Knurek CS, Bogart GR, Novembre AE, Liddle JA, Lercel M, Magg C, Collins K, Trybendis M, Cadwell N, Jeffer R, Dauksher WJ, Resnick DJ, Mancini D, Han SI, Masnyj Z, Smith K, Mangat PJS Journal of Vacuum Science & Technology B, 19(6), 2659, 2001 |
| 3 |
Technique for rapid at-wavelength inspection of extreme ultraviolet mask blanks Spector SJ, White DL, Tennant DM, Ocola LE, Novembre AE, Peabody ML, Wood OR Journal of Vacuum Science & Technology B, 17(6), 3003, 1999 |
| 4 |
Quantitation of latent resist images using photon tunneling microscopy Liddle JA, Johnson JA, Cirelli R, Mkrtchyan MM, Novembre AE, Peabody ML Journal of Vacuum Science & Technology B, 16(6), 3651, 1998 |
| 5 |
Photon tunneling microscopy of latent resist images Liddle JA, Fernandez AT, Cirelli R, Mkrtchyan MM, Novembre AE, Peabody ML, Watson GP Journal of Vacuum Science & Technology B, 15(6), 2162, 1997 |
| 6 |
Metrology of scattering with angular limitation projection electron lithography masks Liddle JA, Blakey MI, Saunders T, Farrow RC, Fetter LA, Knurek CS, Kasica R, Novembre AE, Peabody ML, Tennant DM, Windt DL, Postek M Journal of Vacuum Science & Technology B, 15(6), 2197, 1997 |
| 7 |
Preliminary-Results from a Prototype Projection Electron-Beam Stepper-Scattering with Angular Limitation Projection Electron-Beam Lithography Proof-of-Concept System Harriott LR, Berger SD, Biddick C, Blakey MI, Bowler SW, Brady K, Camarda RM, Connelly WF, Crorken A, Custy J, Dimarco R, Farrow RC, Felker JA, Fetter L, Freeman R, Hopkins L, Huggins HA, Knurek CS, Kraus JS, Liddle JA, Mkrtychan M, Novembre AE, Peabody ML, Tarascon RG, Wade HH, Waskiewicz WK, Watson GP, Werder KS, Windt D Journal of Vacuum Science & Technology B, 14(6), 3825, 1996 |