검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Spatial light modulator for maskless optical projection lithography Watson GP, Aksyuk V, Simon ME, Tennant DM, Cirelli RA, Mansfield WM, Pardo F, Lopez DO, Bolle CA, Papazian AR, Basavanhally N, Lee J, Fullowan R, Klemens F, Miner J, Kornblit A, Sorsch T, Fetter L, Peabody M, Bower JE, Weiner JS, Low YL Journal of Vacuum Science & Technology B, 24(6), 2852, 2006 |
| 2 |
Commercialization of SCALPEL masks Farrow RC, Novembre AE, Peabody M, Kasica R, Blakey M, Liddle JA, Werder K, DeMarco R, Ocola L, Rutberg L, Saunders T, Unruh J, Qian F, Smith M Journal of Vacuum Science & Technology B, 16(6), 3582, 1998 |
| 3 |
Application of transmission electron detection to SCALPEL mask metrology Farrow RC, Postek MT, Keery WJ, Jones SN, Lowney JR, Blakey M, Fetter LA, Griffith JE, Liddle JA, Hopkins LC, Huggins HA, Peabody M, Novembre A Journal of Vacuum Science & Technology B, 15(6), 2167, 1997 |