검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low temperature SF6/O-2 electron cyclotron resonance plasma etching for polysilicon gates Hasan I, Pawlowicz CA, Berndt LP, Tarr NG Journal of Vacuum Science & Technology A, 20(3), 983, 2002 |
| No. | Article |
|---|---|
| 1 |
Low temperature SF6/O-2 electron cyclotron resonance plasma etching for polysilicon gates Hasan I, Pawlowicz CA, Berndt LP, Tarr NG Journal of Vacuum Science & Technology A, 20(3), 983, 2002 |