검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Particles detection and analysis of hard disk substrate after cleaning of post chemical mechanical polishing Huang YT, Lu XC, Pan GS, Lee B, Luo JB Applied Surface Science, 255(22), 9100, 2009 |
| 2 |
Spectrographic approach for the diagnosis of rf breakdown in accelerating rf structures Tomizawa H, Taniuchi T, Hanaki H, Igarashi Y, Yamaguchi S, Enomoto A Applied Surface Science, 235(1-2), 214, 2004 |
| 3 |
Measurement of trapping behavior of dust particles during plasma process by suck-out method Kondo K, Imajo Y, Shimada M, Okuyama K KAGAKU KOGAKU RONBUNSHU, 29(4), 513, 2003 |
| 4 |
Visualization and numerical simulation of fine particle transport in a low-pressure parallel plate chemical vapor deposition reactor Setyawan H, Shimada M, Ohtsuka K, Okuyama K Chemical Engineering Science, 57(3), 497, 2002 |