검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Sputtering with an etch-free lift-off in thermal nanoimprint lithography Mayer A, Bogdanski N, Mollenbeck S, Dhima K, Papenheim M, Scheer HC Journal of Vacuum Science & Technology B, 28(6), C6M136, 2010 |
| No. | Article |
|---|---|
| 1 |
Sputtering with an etch-free lift-off in thermal nanoimprint lithography Mayer A, Bogdanski N, Mollenbeck S, Dhima K, Papenheim M, Scheer HC Journal of Vacuum Science & Technology B, 28(6), C6M136, 2010 |