검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Removal of Tin from Extreme Ultraviolet Collector Optics by In-Situ Hydrogen Plasma Etching Elg DT, Panici GA, Liu SM, Girolami G, Srivastava SN, Ruzic DN Plasma Chemistry and Plasma Processing, 38(1), 223, 2018 |
| 2 |
Removal of Tin from Extreme Ultraviolet Collector Optics by In-Situ Hydrogen Plasma Etching (vol 38, pg 223, 2018) Elg DT, Panici GA, Liu SM, Girolami G, Srivastava SN, Ruzic DN Plasma Chemistry and Plasma Processing, 38(4), 917, 2018 |