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| No. | Article |
|---|---|
| 1 |
Compositional effects on electrical and mechanical properties in carbon-doped oxide dielectric films: Application of Fourier-transform infrared spectroscopy Andideh E, Lerner M, Palmrose G, El-Mansy S, Scherban T, Xu GH, Blaine J Journal of Vacuum Science & Technology B, 22(1), 196, 2004 |