검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma etch-back planarization coupled to chemical mechanical polishing for sub 0.18 mu m shallow trench isolation technology Schiltz A, Palatini L, Paoli M, Rivoire M, Prola A Journal of Vacuum Science & Technology A, 18(4), 1313, 2000 |