검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Nanosmoothing of single crystal diamond chips by 1 keV Ar+ ion bombardment Nagase T, Kato H, Pahlovy SA, Miyamoto I Journal of Vacuum Science & Technology B, 28(2), 263, 2010 |
| 2 |
Ion beam sharpening of diamond tools having small apex angle without facet and ripple formations Nagase T, Kato H, Pahlovy SA, Miyamoto I, Nakamura Y Journal of Vacuum Science & Technology B, 27(6), 2686, 2009 |
| 3 |
Low energy Ar+ ion beam machining of Si thin layer deposited on a Zerodur (R) substrate for extreme ultraviolet lithography projection optics Iwata T, Fujiwara K, Pahlovy SA, Miyamoto I Journal of Vacuum Science & Technology B, 27(6), 2894, 2009 |
| 4 |
Two stage ion beam figuring and smoothening method for shape error correction of ULE (R) substrates of extreme ultraviolet lithography projection optics: Evaluation of high-spatial frequency roughness Kamijo K, Uozumi R, Moriziri K, Pahlovy SA, Miyamoto I Journal of Vacuum Science & Technology B, 27(6), 2900, 2009 |