검색결과 : 1건
No. | Article |
---|---|
1 |
Effect of contact metals on the piezoelectric properties of aluminum nitride thin films Harman J, Kabulski A, Pagan VR, Famouri P, Kasarla KR, Rodak LE, Hensel JP, Korakakis D Journal of Vacuum Science & Technology B, 26(4), 1417, 2008 |