검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of RF Bias and Nitrogen Flow-Rates on the Reactive Sputtering of Tialn Films Shew BY, Huang JL, Lii DF Thin Solid Films, 293(1-2), 212, 1997 |
| No. | Article |
|---|---|
| 1 |
Effects of RF Bias and Nitrogen Flow-Rates on the Reactive Sputtering of Tialn Films Shew BY, Huang JL, Lii DF Thin Solid Films, 293(1-2), 212, 1997 |