검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Energy distribution of ions bombarding biased electrodes in high density plasma reactors Edelberg EA, Perry A, Benjamin N, Aydil ES Journal of Vacuum Science & Technology A, 17(2), 506, 1999 |
| No. | Article |
|---|---|
| 1 |
Energy distribution of ions bombarding biased electrodes in high density plasma reactors Edelberg EA, Perry A, Benjamin N, Aydil ES Journal of Vacuum Science & Technology A, 17(2), 506, 1999 |