| 1 |
Very high frequency plasma reactant for atomic layer deposition
Oh IK, Yoo G, Yoon CM, Kim TH, Yeom GY, Kim K, Lee Z, Jung H, Lee CW, Kim H, Lee HBR
Applied Surface Science, 387, 109, 2016 |
| 2 |
Deposition of a Continuous and Conformal Copper Seed Layer by a Large-Area Electron Cyclotron Resonance Plasma Source with Embedded Lisitano Antenna
Jang SO, You HJ, Kim YW, Jung YH, Hwang IU, Park JY, Lee H
Plasma Chemistry and Plasma Processing, 34(1), 229, 2014 |
| 3 |
X-ray emission analysis of a plasma source using an yttrium and a mylar target for the generation of 2.48 nm wavelength microbeam
Palladino L, De Lorenzo RG, Emilio MD, Limongi T
Applied Surface Science, 272, 119, 2013 |
| 4 |
Comparative Study of Methane Activation Process by Different Plasma Sources
Lee DH, Song YH, Kim KT, Lee JO
Plasma Chemistry and Plasma Processing, 33(4), 647, 2013 |
| 5 |
Optimization of nitrogen plasma source parameters by measurements of emitted light intensity for growth of GaN by molecular beam epitaxy
Klosek K, Sobanska M, Tchutchulashvili G, Zytkiewicz ZR, Teisseyre H, Klopotowski L
Thin Solid Films, 534, 107, 2013 |
| 6 |
Effect of Advanced Plasma Source bias voltage on properties of HfO2 films prepared by plasma ion assisted electron evaporation from metal hafnium
Zhu MP, Yi K, Arhilger D, Qi HJ, Shao JD
Thin Solid Films, 540, 17, 2013 |
| 7 |
Experimental investigation of plasma recovery during the pulse-off time in plasma source ion implantation
Chung KJ, Jung B, Choe JM, Kim GH, Hwang YS
Thin Solid Films, 547, 13, 2013 |
| 8 |
Numerical investigation of plasma recovery in plasma source ion implantation
Chung KJ, Choe JM, Kim GH, Hwang YS
Thin Solid Films, 521, 197, 2012 |
| 9 |
Spectroscopic Characterization of Miniaturized Atmospheric-Pressure dc Glow Discharge Generated in Contact with Flowing Small Size Liquid Cathode
Jamroz P, Zyrnicki W
Plasma Chemistry and Plasma Processing, 31(5), 681, 2011 |
| 10 |
Heat flux estimation of a plasma rocket helicon source by solution of the inverse heat conduction problem
Mulcahy JM, Browne DJ, Stanton KT, Diaz FRC, Cassady LD, Berisford DF, Bengtson RD
International Journal of Heat and Mass Transfer, 52(9-10), 2343, 2009 |
