검색결과 : 1건
No. | Article |
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1 |
Triphenylsulfonium salt methacrylate bound polymer resist for electron beam lithography Yoo JB, Park SW, Kang HN, Mondkar HS, Sohn K, Kim HM, Kim KB, Lee H Polymer, 55(16), 3599, 2014 |
No. | Article |
---|---|
1 |
Triphenylsulfonium salt methacrylate bound polymer resist for electron beam lithography Yoo JB, Park SW, Kang HN, Mondkar HS, Sohn K, Kim HM, Kim KB, Lee H Polymer, 55(16), 3599, 2014 |