검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The effect of ozone concentration during atomic layer deposition on the properties of ZrO2 films for capacitor applications Song H, Jeon H, Shin C, Shin S, Jang W, Park J, Chang J, Choi JH, Kim Y, Lim H, Seo H, Jeon H Thin Solid Films, 619, 317, 2016 |