화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Fracture Behavior of Woven Silicon Carbide Fibers Exposed to High-Temperature Nitrogen and Oxygen Plasmas
Owens W, Merkel D, Sansoz F, Fletcher D
Journal of the American Ceramic Society, 98(12), 4003, 2015
2 Basic constraints for a multibeam lithography column
Mankos M, Coyle S, Fernandez A, Sagle A, Owens W, Sullivan J, Chang THP
Journal of Vacuum Science & Technology B, 19(2), 467, 2001
3 Multisource optimization of a column for electron lithography
Mankos M, Coyle S, Fernandez A, Sagle A, Allen P, Owens W, Sullivan J, Chang THP
Journal of Vacuum Science & Technology B, 18(6), 3010, 2000