검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Control of photocorrosion in the copper damascene process Homma Y, Kondo S, Sakuma N, Hinode K, Noguchi J, Ohashi N, Yamaguchi H, Owada N Journal of the Electrochemical Society, 147(3), 1193, 2000 |
| 2 |
Abrasive-free polishing for copper damascene interconnection Kondo S, Sakuma N, Homma Y, Goto Y, Ohashi N, Yamaguchi H, Owada N Journal of the Electrochemical Society, 147(10), 3907, 2000 |