검색결과 : 16건
| No. | Article |
|---|---|
| 1 |
Chemistry in long residence time fluorocarbon plasmas Sant SP, Nelson CT, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 27(2), 193, 2009 |
| 2 |
Relationship between gas-phase chemistries and surface processes in fluorocarbon etch plasmas: A process rate model Sant SP, Nelson CT, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 27(4), 631, 2009 |
| 3 |
Two cryogenic processes involving SF6, O-2, and SiF4 for silicon deep etching Tillocher T, Dussart R, Overzet LJ, Mellhaoui X, Lefaucheux P, Boufnichel M, Ranson P Journal of the Electrochemical Society, 155(3), D187, 2008 |
| 4 |
Role of chamber dimension in fluorocarbon based deposition and etching of SiO2 and its effects on gas and surface-phase chemistry Joseph EA, Zhou BS, Sant SP, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 26(3), 545, 2008 |
| 5 |
Effects of pore morphology on the diffusive properties of a porous low-kappa dielectric Joseph EA, Sant SP, Goeckner MJ, Overzet LJ, Peng HG, Gidley DW, Kastenmeier BEE Journal of Vacuum Science & Technology B, 25(5), 1684, 2007 |
| 6 |
Spectroscopic study of gas and surface phase chemistries of CF4 plasmas in an inductively coupled modified gaseous electronics conference reactor Zhou B, Joseph EA, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 24(1), 114, 2006 |
| 7 |
In situ Fourier transform infrared characterization of the plasma chemistry in varying pulsed cycles of a 1,3-butadiene discharge in an inductively coupled gaseous electronics conference cell Jindal AK, Prengler AJ, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 24(1), 126, 2006 |
| 8 |
Oxidation threshold in silicon etching at cryogenic temperatures Tillocher T, Dussart R, Mellhaoui X, Lefaucheux P, Maaza NM, Ranson P, Boufnichel M, Overzet LJ Journal of Vacuum Science & Technology A, 24(4), 1073, 2006 |
| 9 |
Gas-phase and sample characterizations of multiwall carbon nanotube growth using an atmospheric pressure plasma Chandrashekar A, Lee JS, Lee GS, Goeckner MJ, Overzet LJ Journal of Vacuum Science & Technology A, 24(5), 1812, 2006 |
| 10 |
Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates Ramachandran S, Tao L, Lee TH, Sant S, Overzet LJ, Goeckner MJ, Kim MJ, Lee GS, Hu W Journal of Vacuum Science & Technology B, 24(6), 2993, 2006 |