검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemical and structural characterization of SiONC dielectric thin film deposited by PSCVD Oulachgar EH, Aktik C, Dostie S, Sowerby R, Gujrathi S, Scarlete M Journal of the Electrochemical Society, 153(11), F255, 2006 |
| No. | Article |
|---|---|
| 1 |
Chemical and structural characterization of SiONC dielectric thin film deposited by PSCVD Oulachgar EH, Aktik C, Dostie S, Sowerby R, Gujrathi S, Scarlete M Journal of the Electrochemical Society, 153(11), F255, 2006 |