검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Metal-catalyzed addition polymers for 157 nm resist applications. synthesis and polymerization of partially fluorinated, ester-functionalized tricyclo[4.2.1.0(2,5)]non-7-enes Sanders DP, Connor EF, Grubbs RH, Hung RJ, Osborn BP, Chiba T, MacDonald SA, Willson CG, Conley W Macromolecules, 36(5), 1534, 2003 |
| 2 |
Metal-catalyzed vinyl addition polymers for 157 nm resist applications. 2. Fluorinated norbornenes: Synthesis, polymerization, and initial imaging results Tran HV, Hung RJ, Chiba T, Yamada S, Mrozek T, Hsieh YT, Chambers CR, Osborn BP, Trinque BC, Pinnow MJ, MacDonald SA, Willson CG, Sanders DP, Connor EF, Grubbs RH, Conley W Macromolecules, 35(17), 6539, 2002 |