검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Improved reliability for gate dielectric of low-temperature polysilicon thin-film transistors by NO-plasma nitridation Or DCT, Lai PT, Sin JKO, Xu JP Solid-State Electronics, 47(8), 1391, 2003 |
| 2 |
Optimization of plasma nitridation for reliability enhancement of low-temperature gate dielectric in MOS devices Or DCT, Lai PT, Sin JKO Solid-State Electronics, 47(11), 2049, 2003 |