검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Studies on Optimal Gas Supply For a Maskless Etching System with Micro-Discharge Plasma Operated at Atmospheric Pressure Hamada T, Arimura T, Sakoda T Plasma Chemistry and Plasma Processing, 32(2), 325, 2012 |
| No. | Article |
|---|---|
| 1 |
Studies on Optimal Gas Supply For a Maskless Etching System with Micro-Discharge Plasma Operated at Atmospheric Pressure Hamada T, Arimura T, Sakoda T Plasma Chemistry and Plasma Processing, 32(2), 325, 2012 |