검색결과 : 2건
No. | Article |
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1 |
Atomic layer deposition of AlOx for thin film head gap applications Paranjpe A, Gopinath S, Omstead T, Bubber R Journal of the Electrochemical Society, 148(9), G465, 2001 |
2 |
Ultralarge scale integrated metallization and interconnects Whitman C, Moslehi MM, Paranjpe A, Velo L, Omstead T Journal of Vacuum Science & Technology A, 17(4), 1893, 1999 |