화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Production of two types of ice crystal-controlling proteins in Antarctic bacterium
Kawahara H, Nakano Y, Omiya K, Muryoi N, Nishikawa J, Obata H
Journal of Bioscience and Bioengineering, 98(3), 220, 2004
2 A process for photoresist removal after aluminum etching using plasma treatment in a gas containing hydrogen
Makoto S, Touno I, Omiya K, Homma T, Nagatomo T
Journal of the Electrochemical Society, 149(8), G451, 2002
3 Highly selective photoresist ashing by addition of ammonia to plasma containing carbon tetrafluoride
Saito M, Eto H, Omiya K, Homma T, Nagatomo T
Journal of the Electrochemical Society, 148(2), G59, 2001
4 Enhancement of etching rate of SiN films by addition of gases containing hydrogen to CF4/O-2
Kataoka Y, Saito S, Omiya K
Journal of the Electrochemical Society, 146(9), 3435, 1999
5 Effect of gas addition on ozone ashing
Omiya K, Kataoka Y
Journal of the Electrochemical Society, 145(12), 4323, 1998