검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
On the synthesis of ultra smooth ITO thin films by conventional direct current magnetron sputtering Betz U, Olsson MK, Marthy J, Escola MF Thin Solid Films, 516(7), 1334, 2008 |
| 2 |
Mechanical integrity of transparent conductive oxide films for flexible polymer-based displays Leterrier Y, Medico L, Demarco F, Manson JAE, Betz U, Escola MF, Olsson MK, Atamny F Thin Solid Films, 460(1-2), 156, 2004 |
| 3 |
Mechanisms for reactive DC magnetron sputtering of elements with different atomic masses: large area coatings of Al oxide and W oxide Olsson MK, Macak K Thin Solid Films, 371(1-2), 86, 2000 |
| 4 |
High rate reactive de magnetron sputter deposition of Al2O3 films Olsson MK, Macak K, Helmersson U, Hjorvarsson B Journal of Vacuum Science & Technology A, 16(2), 639, 1998 |
| 5 |
Modeling of the deposition of stoichiometric Al2O3 using nonarcing direct current magnetron sputtering Macak K, Nyberg T, Macak P, Olsson MK, Helmersson U, Berg S Journal of Vacuum Science & Technology A, 16(3), 1286, 1998 |