검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of in situ ultrasound treatment during ion implantation on amorphization and junction formation in silicon Kruger D, Romanyuk B, Melnik V, Olikh Y, Kurps R Journal of Vacuum Science & Technology B, 20(4), 1448, 2002 |