검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Fast Diffusion of Water Molecules into Chemically Modified SiO2 Films Formed by Chemical Vapor Deposition Ohtake A, Kobayashi K, Kurokawa S, Ohnishi O, Doi T Chemistry Letters, 41(1), 60, 2012 |
| 2 |
The Polishing Technology for Glass Substrates Using Tribo-Chemical Reaction and Electrical Slurry Control Ikeda H, Akagami Y, Uneda M, Ohnishi O, Kurokawa S, Doi TK Journal of the Electrochemical Society, 159(4), H421, 2012 |
| 3 |
Analysis of Chemical and Mechanical Factors in CMP Processes for Improving Material Removal Rate Tamai K, Morinaga H, Doi TK, Kurokawa S, Ohnishi O Journal of the Electrochemical Society, 158(3), H333, 2011 |