화학공학소재연구정보센터
검색결과 : 10건
No. Article
1 Growth of antimony selenide solar absorber on micro textured substrates for efficient light trapping and enhanced optical absorption
Jagadish R, Sathiamoorthy S, Tiwari KJ, Suraj TS, Rao MSR, Malar P
Solar Energy, 211, 977, 2020
2 Lithographically patterned silicon nanostructures on silicon substrates
Megouda N, Piret G, Galopin E, Coffinier Y, Hadjersi T, Elkechai O, Boukherroub R
Applied Surface Science, 258(16), 6007, 2012
3 In vitro formation of capillary networks using optical lithographic techniques
Kobayashi A, Miyake H, Hattori H, Kuwana R, Hiruma Y, Nakahama KI, Ichinose S, Ota M, Nakamura M, Takeda S, Morita I
Biochemical and Biophysical Research Communications, 358(3), 692, 2007
4 Double-layer inorganic antireflective system for KrF lithography
Xu M, Ko TM
Journal of Vacuum Science & Technology B, 18(1), 127, 2000
5 Near-field distribution in light-coupling masks for contact lithography
Paulus M, Michel B, Martin OJF
Journal of Vacuum Science & Technology B, 17(6), 3314, 1999
6 Extension of Krypton Fluoride Excimer-Laser Lithography to the Fabrication of 0.18 Mu-M Devices
Ogawa T, Uematsu M, Takeuchi K, Oda T
Journal of Vacuum Science & Technology B, 15(5), 1825, 1997
7 Filter design methodology for defect detection in wafer inspection
Socha RJ, Neureuther AR
Journal of Vacuum Science & Technology B, 15(6), 2718, 1997
8 Multiple-Layer Blank Structure for Phase-Shifting Mask Fabrication
Pierrat C, Siegrist T, Demarco J, Harriott L, Vaidya S
Journal of Vacuum Science & Technology B, 14(1), 63, 1996
9 Mold-Assisted Nanolithography - A Process for Reliable Pattern Replication
Haisma J, Verheijen M, Vandenheuvel K, Vandenberg J
Journal of Vacuum Science & Technology B, 14(6), 4124, 1996
10 Phase-Shifting Lithography - Maskmaking and Its Application
Watanabe H, Todokoro Y
Journal of Vacuum Science & Technology B, 11(6), 2669, 1993