화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Transition from wire formation to island formation in thermal agglomeration of a (111) silicon-on-insulator layer
Burbanudin ZA, Nuryadi R, Ishikawa Y, Tabe M
Thin Solid Films, 508(1-2), 235, 2006
2 Effect of patterning on thermal agglomeration of ultrathin silicon-on-insulator layer
Ishikawa Y, Kumezawa M, Nuryadi R, Tabe M
Applied Surface Science, 190(1-4), 11, 2002
3 Thermal agglomeration of single-crystalline Si layer on buried SiO2 in ultrahigh vacuum
Nuryadi R, Ishikawa Y, Ono Y, Tabe M
Journal of Vacuum Science & Technology B, 20(1), 167, 2002
4 Formation and ordering of self-assembled Si islands by ultrahigh vacuum annealing of ultrathin bonded silicon-on-insulator structure
Nuryadi R, Ishikawa Y, Tabe M
Applied Surface Science, 159, 121, 2000