검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Experimental evaluation of an optimized radiation cooling geometry for ion projection lithography masks Torres JL, Nounu HN, Wasson JR, Wolfe JC, Lutz J, Haugeneder E, Loschner H, Stengl G, Kaesmaier R Journal of Vacuum Science & Technology B, 18(6), 3207, 2000 |