검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Synthesis of BNx-SiNy composite films by multisource plasma chemical vapor deposition Nonogaki R, Yamada S, Ibukiyama M, Wada T Journal of Vacuum Science & Technology A, 19(5), 2039, 2001 |
| 2 |
Multisource plasma chemical vapor deposition for synthesis of SiNx-SiOy and SiNx-SiCy composite films Nonogaki R, Yamada S, Wada T Journal of Vacuum Science & Technology A, 18(1), 63, 2000 |
| 3 |
High rate deposition of diamond-like carbon films by sheet-like plasma chemical vapor deposition Nonogaki R, Yamada S, Araki T, Wada T Journal of Vacuum Science & Technology A, 17(3), 731, 1999 |
| 4 |
Twin-source plasma chemical vapor deposition for high rate deposition of SiO2 films Nonogaki R, Nakai S, Yamada S, Wada T Journal of Vacuum Science & Technology A, 16(5), 2827, 1998 |