검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evaluation of Ti-Si-N as a diffusion barrier between copper and silicon No JT, O JH, Lee C Materials Chemistry and Physics, 63(1), 44, 2000 |
| No. | Article |
|---|---|
| 1 |
Evaluation of Ti-Si-N as a diffusion barrier between copper and silicon No JT, O JH, Lee C Materials Chemistry and Physics, 63(1), 44, 2000 |