검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of substrate bias and nitrogen flow ratio on the surface morphology and binding state of reactively sputtered ZrNx films before and after annealing Jeng JS, Chen JS Applied Surface Science, 255(19), 8263, 2009 |
| No. | Article |
|---|---|
| 1 |
Effects of substrate bias and nitrogen flow ratio on the surface morphology and binding state of reactively sputtered ZrNx films before and after annealing Jeng JS, Chen JS Applied Surface Science, 255(19), 8263, 2009 |