검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Depth distribution of plasma induced damage and dislocation generation due to an interaction of subsequent oxidation Yamaguchi T, Sasaki T, Nikoh H, Ito T Journal of Vacuum Science & Technology A, 18(3), 830, 2000 |
| No. | Article |
|---|---|
| 1 |
Depth distribution of plasma induced damage and dislocation generation due to an interaction of subsequent oxidation Yamaguchi T, Sasaki T, Nikoh H, Ito T Journal of Vacuum Science & Technology A, 18(3), 830, 2000 |