검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low temperature oxidation of CVD SiC by electron cyclotron resonance plasma Goto T, Masumoto H, Niizuma M Materials Chemistry and Physics, 75(1-3), 235, 2002 |
| No. | Article |
|---|---|
| 1 |
Low temperature oxidation of CVD SiC by electron cyclotron resonance plasma Goto T, Masumoto H, Niizuma M Materials Chemistry and Physics, 75(1-3), 235, 2002 |