검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Quantitative determination of dielectric thin-film properties on product wafers using infrared reflection-absorption spectroscopy Niemczyk TM, Zhang LZ, Haaland DM, Radigan KJ Journal of Vacuum Science & Technology A, 16(6), 3490, 1998 |
| 2 |
Testing of a Rapid Fault-Detection Model for Quality-Control - Borophosphosilicate Glass Thin-Films Monitored by Infrared-Absorption Spectroscopy Zhang S, Franke JE, Niemczyk TM, Haaland DM, Cox JN, Banerjee I Journal of Vacuum Science & Technology B, 15(4), 955, 1997 |
| 3 |
Trace Water-Vapor Detection in Nitrogen and Corrosive-Gases by FTIR Spectroscopy Stallard BR, Espinoza LH, Rowe RK, Garcia MJ, Niemczyk TM Journal of the Electrochemical Society, 142(8), 2777, 1995 |
| 4 |
Quantitative-Analysis of Borophosphosilicate Glass-Films on Silicon Using Infrared External Reflection-Absorption Spectroscopy Franke JE, Zhang LZ, Niemczyk TM, Haaland DM, Radigan KJ Journal of Vacuum Science & Technology A, 13(4), 1959, 1995 |
| 5 |
Precise Property Determinations of Arsenosilicate Glass Thin-Films Using Infrared-Spectroscopy Niemczyk TM, Wangmaneerat B, Haaland DM Journal of Vacuum Science & Technology A, 12(3), 835, 1994 |