검색결과 : 16건
| No. | Article |
|---|---|
| 1 |
Annealing of amorphous Ir18Si15O67 films in dry oxygen Giauque PH, Cherry HB, Nicolet MA, Bernard C, Pisch A Thin Solid Films, 406(1-2), 299, 2002 |
| 2 |
Thermal stability of amorphous thin films: Ti3Si1O8 vs. TiO2 and mictamict compounds Giauque PH, Cherry HB, Nicolet MA Thin Solid Films, 394(1-2), 136, 2001 |
| 3 |
Instability of amorphous Ru-Si-O thin films under thermal oxidation Gasser SM, Ruiz R, Kolawa E, Nicolet MA Journal of the Electrochemical Society, 146(4), 1546, 1999 |
| 4 |
Thermal reaction of Pt film with < 110 > GaN epilayer Gasser SM, Kolawa E, Nicolet MA Journal of Vacuum Science & Technology A, 17(5), 2642, 1999 |
| 5 |
Moving species in Ti34Si23N43 oxidation Kacsich T, Nicolet MA Thin Solid Films, 349(1-2), 1, 1999 |
| 6 |
Texture of copper films on Ta35Si18N47 and Ti33Si23N44 underlayers Tsuji Y, Gasser SM, Kolawa E, Nicolet MA Thin Solid Films, 350(1-2), 1, 1999 |
| 7 |
Growth and properties of W-Si-N diffusion barriers deposited by chemical vapor deposition Fleming JG, Roherty-Osmun E, Smith PM, Custer JS, Kim YD, Kacsich T, Nicolet MA, Galewski CJ Thin Solid Films, 320(1), 10, 1998 |
| 8 |
Model of Oxidation of Tin in Ion-Beam-Assisted Deposition Process Kubota H, Easterbrook M, Tokunaga M, Sakata I, Nagata M, Nicolet MA Thin Solid Films, 281-282, 108, 1996 |
| 9 |
Gold Metallization for Aluminum Nitride Shalish I, Gasser SM, Kolawa E, Nicolet MA, Ruiz RP Thin Solid Films, 289(1-2), 166, 1996 |
| 10 |
Method for Fabricating a Low-Stress X-Ray Mask Using Annealable Amorphous Refractory Compounds Dauksher WJ, Resnick DJ, Cummings KD, Baker J, Gregory RB, Theodore ND, Chan JA, Johnson WA, Mogab CJ, Nicolet MA, Reid JS Journal of Vacuum Science & Technology B, 13(6), 3103, 1995 |