화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Effect of the dielectric-substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics
Sinha H, Sehgal A, Ren H, Nichols MT, Tomoyasu M, Russell NM, Nishi Y, Shohet JL
Thin Solid Films, 519(16), 5464, 2011
2 Charge Trapping within UV and Vacuum UV Irradiated Low-k Porous Organosilicate Dielectrics
Lauer JL, Sinha H, Nichols MT, Antonelli GA, Nishi Y, Shohet JL
Journal of the Electrochemical Society, 157(8), G177, 2010