| 1 |
Subatmospheric Chemical-Vapor-Deposited Boron-Doped Silicate Glass-Films for Solid-Phase Diffusion Applications
Xia LQ, Yieh E, Venkataraman S, Nguyen BC
Journal of the Electrochemical Society, 144(5), L117, 1997 |
| 2 |
Process Characteristics for Subatmospheric Chemical-Vapor-Deposited Borophosphosilicate Glass and Effect of Carrier Gas
Xia LQ, Yieh E, Gee P, Campana F, Nguyen BC
Journal of the Electrochemical Society, 144(9), 3208, 1997 |
| 3 |
Gap Fill and Film Reflow Capability of Subatmospheric Chemical-Vapor-Deposited Borophosphosilicate Glass
Robles S, Russell K, Galiano M, Siva V, Kithcart V, Nguyen BC
Journal of the Electrochemical Society, 143(4), 1414, 1996 |
| 4 |
Moisture Resistance of Plasma-Enhanced Chemical-Vapor-Deposited Oxides Used for Ultralarge Scale Integrated Device Applications
Robles S, Yieh E, Nguyen BC
Journal of the Electrochemical Society, 142(2), 580, 1995 |
| 5 |
Surface Related Phenomena in Integrated PECVD Ozone Teos Sacvd Processes for Subhalf Micron Gap Fill - Electrostatic Effects
Kwok K, Yieh E, Robles S, Nguyen BC
Journal of the Electrochemical Society, 141(8), 2172, 1994 |
