검색결과 : 19건
| No. | Article |
|---|---|
| 1 |
A single gas barrier layer of high-density Al2O3 formed by neutral beam-assisted sputtering at room temperature Jang Y, Shin S, Yi S, Hong M Thin Solid Films, 674, 52, 2019 |
| 2 |
Neutral beam process in AlGaN/GaN HEMTs: Impact on current collapse Hemmi F, Thomas C, Lai YC, Higo A, Watamura Y, Samukawa S, Otsuji T, Suemitsu T Solid-State Electronics, 137, 1, 2017 |
| 3 |
Characteristics of silicon oxynitride films grown by using neutral-beams and inductively coupled plasma Kim J, Kim DC, Kim YW Thin Solid Films, 642, 281, 2017 |
| 4 |
Nitridation of silicon by nitrogen neutral beam Hara Y, Shimizu T, Shingubara S Applied Surface Science, 363, 555, 2016 |
| 5 |
Bonding state and defects of nitrogen-doped graphene in oxygen reduction reaction Okada T, Inoue KY, Kalita G, Tanemura M, Matsue T, Meyyappan M, Samukawa S Chemical Physics Letters, 665, 117, 2016 |
| 6 |
Precise control over oxygen impurities in nano-crystalline silicon thin film processed with a low hydrogen dilution gas system at near room temperature Jang JN, Lee DH, Hong M Current Applied Physics, 14(6), 901, 2014 |
| 7 |
Improvement of metal gate/high-k dielectric CMOSFETs characteristics by neutral beam etching of metal gate Min KS, Park C, Kang CY, Park CS, Park BJ, Kim YW, Lee BH, Lee JC, Bersuker G, Kirsch P, Jammy R, Yeom GY Solid-State Electronics, 86, 75, 2013 |
| 8 |
Analysis of the crystalline characteristics of nc-Si: H thin film using a hyperthermal neutral beam generated by an inclined slot-excited antenna Park JB, Kim YW, Kim DC, Kim J, Hong SP, Yoo SJ, Oh KS Thin Solid Films, 547, 72, 2013 |
| 9 |
Performance of 300 s-beam extraction in the KSTAR neutral beam injector Chang DH, Jeong SH, Kim TS, Lee KW, In SR, Bae YS, Kim JS, Park HT, Kim DH, Yang HL Current Applied Physics, 12(4), 1217, 2012 |
| 10 |
Beam Characteristics Study for the KSTAR neutral beam long pulse ion source Kim TS, Jeong SH, Chang DH, In SR, Oh BH, Chang DS, Jin JT, Seo CS, Lee KW, Song WS, Kim JC Current Applied Physics, 11(5), S145, 2011 |