검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Tungsten chemical mechanical polishing Elbel N, Neureither B, Ebersberger B, Lahnor P Journal of the Electrochemical Society, 145(5), 1659, 1998 |
| 2 |
High Selectivity Magnetically Enhanced Reactive Ion Etching of Boron-Nitride Films Cote D, Nguyen S, Dobuzinsky D, Basa C, Neureither B Journal of the Electrochemical Society, 141(12), 3456, 1994 |
| 3 |
Boron-Nitride and Silicon Boron-Nitride Film and Polish Characterization Neureither B, Basa C, Sandwick T, Blumenstock K Journal of the Electrochemical Society, 140(12), 3607, 1993 |