검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Elastic and anelastic properties, internal stress and thermal expansion coefficient of cubic boron nitride films on silicon Harms U, Gaertner M, Schutze A, Bewilogua K, Neuhauser H Thin Solid Films, 385(1-2), 275, 2001 |
| 2 |
Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb2O5 films Hunsche B, Vergohl M, Neuhauser H, Klose F, Szyszka B, Matthee T Thin Solid Films, 392(2), 184, 2001 |
| 3 |
Influence of stress in thin film modulus measurements by the vibrating reed technique Harms U, Kempen L, Neuhauser H Thin Solid Films, 323(1-2), 153, 1998 |