화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Influence of the bilayer thickness on the optical properties of Al2O3-Y2O3 dielectric nanolaminate films grown by thermal atomic layer deposition
Lopez J, Sotelo A, Castillon FF, Machorro R, Nedev N, Farias MH, Tiznado H
Materials Research Bulletin, 87, 14, 2017
2 Thin SiO2/a-Si:H/SiO2 multilayer insulators obtained by electron cyclotron resonance chemical vapor deposition at room temperature for possible application in non-volatile memories
Mateos D, Diniz JA, Nedev N, Munoz SNM, Curiel M, Mederos M, Valdez B, Montero G
Thin Solid Films, 628, 96, 2017
3 Sputtering preparation of silicon nitride thin films for gate dielectric applications
Pereira L, Aguas H, Igreja R, Martins RMS, Nedev N, Raniero L, Fortunato E, Martins R
Materials Science Forum, 455-456, 69, 2004
4 Influence of the rapid thermal annealing on the properties of thin a-Si films
Nedev N, Beshkov G, Fortunato E, Georgiev SS, Ivanov T, Raniero L, Zhang SB, Martins R
Materials Science Forum, 455-456, 108, 2004