화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Analysis of nitrogen species in titanium oxynitride ALD films
Sowinska M, Brizzi S, Das C, Karkkanen I, Schneidewind J, Naumann F, Gargouri H, Henkel K, Schmeisser D
Applied Surface Science, 381, 42, 2016
2 Damage Characterization of Ion-Beam Exposed Metal-Oxide-Semiconductor Varactor Cells by Charge to Breakdown Measurements
Brunger WH, Buchmann LM, Naumann F, Friedrich D, Finkelstein W, Mohondro R
Journal of Vacuum Science & Technology B, 13(6), 2561, 1995
3 Growth-Rate and Characterization of Silicon-Oxide Films Grown in N2O Atmosphere in a Rapid Thermal Processor
Lange P, Bernt H, Hartmannsgruber E, Naumann F
Journal of the Electrochemical Society, 141(1), 259, 1994