검색결과 : 3건
No. | Article |
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1 |
Analysis of nitrogen species in titanium oxynitride ALD films Sowinska M, Brizzi S, Das C, Karkkanen I, Schneidewind J, Naumann F, Gargouri H, Henkel K, Schmeisser D Applied Surface Science, 381, 42, 2016 |
2 |
Damage Characterization of Ion-Beam Exposed Metal-Oxide-Semiconductor Varactor Cells by Charge to Breakdown Measurements Brunger WH, Buchmann LM, Naumann F, Friedrich D, Finkelstein W, Mohondro R Journal of Vacuum Science & Technology B, 13(6), 2561, 1995 |
3 |
Growth-Rate and Characterization of Silicon-Oxide Films Grown in N2O Atmosphere in a Rapid Thermal Processor Lange P, Bernt H, Hartmannsgruber E, Naumann F Journal of the Electrochemical Society, 141(1), 259, 1994 |