화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Highly Anisotropic Silicon Reactive Ion Etching for Nanofabrication Using Mixtures of SF6/Chf3 Gases
Grigoropoulos S, Gogolides E, Tserepi AD, Nassiopoulos AG
Journal of Vacuum Science & Technology B, 15(3), 640, 1997
2 Electroluminescent Solid-State Devices Based on Silicon Nanowires, Fabricated by Using Lithography and Etching Techniques
Nassiopoulos AG, Grigoropoulos S, Papadimitriou D
Thin Solid Films, 297(1-2), 176, 1997
3 Erbium Silicide Films on (100) Silicon, Grown in High-Vacuum - Fabrication and Properties
Kaltsas G, Travlos A, Salamouras N, Nassiopoulos AG, Revva P, Traverse A
Thin Solid Films, 275(1-2), 87, 1996
4 Submicrometer Luminescent Porous Silicon Structures Using Lithographically Patterned Substrates
Nassiopoulos AG, Grigoropoulos S, Canham L, Halimaoui A, Berbezier I, Gogolides E, Papadimitriou D
Thin Solid Films, 255(1-2), 329, 1995
5 Titanium Disilicide on Silicon by Interdiffusion of Titanium and Amorphous-Silicon Multilayers - Transmission Electron-Microscopy, Spectroscopic Ellipsometry and Resistivity Measurements
Nassiopoulos AG, Tambouris D, Frangis N, Logothetidis S, Georga S, Krontiras C, Xanthopoulos N
Thin Solid Films, 247(1), 44, 1994