검색결과 : 5건
No. | Article |
---|---|
1 |
Highly Anisotropic Silicon Reactive Ion Etching for Nanofabrication Using Mixtures of SF6/Chf3 Gases Grigoropoulos S, Gogolides E, Tserepi AD, Nassiopoulos AG Journal of Vacuum Science & Technology B, 15(3), 640, 1997 |
2 |
Electroluminescent Solid-State Devices Based on Silicon Nanowires, Fabricated by Using Lithography and Etching Techniques Nassiopoulos AG, Grigoropoulos S, Papadimitriou D Thin Solid Films, 297(1-2), 176, 1997 |
3 |
Erbium Silicide Films on (100) Silicon, Grown in High-Vacuum - Fabrication and Properties Kaltsas G, Travlos A, Salamouras N, Nassiopoulos AG, Revva P, Traverse A Thin Solid Films, 275(1-2), 87, 1996 |
4 |
Submicrometer Luminescent Porous Silicon Structures Using Lithographically Patterned Substrates Nassiopoulos AG, Grigoropoulos S, Canham L, Halimaoui A, Berbezier I, Gogolides E, Papadimitriou D Thin Solid Films, 255(1-2), 329, 1995 |
5 |
Titanium Disilicide on Silicon by Interdiffusion of Titanium and Amorphous-Silicon Multilayers - Transmission Electron-Microscopy, Spectroscopic Ellipsometry and Resistivity Measurements Nassiopoulos AG, Tambouris D, Frangis N, Logothetidis S, Georga S, Krontiras C, Xanthopoulos N Thin Solid Films, 247(1), 44, 1994 |