검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Bias frequency dependence of pn junction charging damage induced by plasma processing Kamei M, Nakakubo Y, Eriguchi K, Ono K Thin Solid Films, 518(13), 3469, 2010 |
| 2 |
Modeling of ion-bombardment damage on Si surfaces for in-line analysis Matsuda A, Nakakubo Y, Takao Y, Eriguchi K, Ono K Thin Solid Films, 518(13), 3481, 2010 |