화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Thermal Nitridation of SiO2-Films in Ammonia - Isotopic Tracing of Nitrogen and Oxygen in the Initial-Stages
Baumvol IJ, Stedile FC, Ganem JJ, Trimaille I, Rigo S
Journal of the Electrochemical Society, 143(9), 2938, 1996
2 Thermal Nitridation of SiO2-Films in Ammonia - Isotopic Tracing of Nitrogen and Oxygen in Further Stages and in Reoxidation
Baumvol IJ, Stedile FC, Ganem JJ, Trimaille I, Rigo S
Journal of the Electrochemical Society, 143(9), 2946, 1996